เก็บเป็นหน้าที่ใช้บ่อย
ตั้งเป็นหน้าแรก
World Highest Resolution of 0.3 nm
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A highly stable optical path He-Ne laser interferometer is used in the sensor.
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Achieves high resolution over a wide range.
Linear Motor Drive
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A linear motor drive ensures high accuracy and high-speed movement.
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Low vibration ensures more stable measurement at high magnifications.
Roughness and Contour Analyzed in a Single Measurement
Measurement efficiency is improved, while maintaining high accuracy.
Large Size Maintains Accuracy
CNC table can be added after installation of the instrument.
Highly Stable Optical Path Laser Interferometer
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This measuring machine adopts an optical fiber-based laser interferometer, one of Tokyo Seimitsu's constituent technologies, and incorporates a newly developed, highly stable optical path laser interferometer having a resolution of 0.3 nm.
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This system features a dynamic range to resolution ratio of 43 333 000:1, which means that contour shapes over a wide range and minute hidden surface shapes can be evaluated by a single trace.
Automatic Measurement Over a Wide Range
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Workpiece angle is detected after workpiece tracing, and the tracing driver's auto leveling feature returns the workpiece and tracing driver to level.
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Wide measuring range of 200 mm (horizontal direction) and 13 mm (vertical direction)
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The tracing driver tilt can be automatically controlled by ±45 °.
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Teaching/playback function allows processes from measurement through printing automatically
*Tracing driver tilting device is included as standard on SURFCOM5000DX-T and SD-T
